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Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser

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Abstract

The laser-induced damage threshold of a calcium fluoride (CaF2) single crystal was obtained by a 193 nm ArF excimer laser. The damage morphology of the crystal was analyzed. The results showed that the surface of CaF2 single crystal broke along the natural cleavage plane under ArF excimer laser irradiation, some fragments fell off, and Newton’s rings were observed on the curved fragments. Laser-induced periodic stripe structures (LIPSS) appeared on the surface layer beneath the fragments that peeled off. The spacing of LIPSS was measured, and the formation mechanism of LIPSS was analyzed based on the interference model.

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DOI:10.3788/COL202018.021403

所屬欄目:Lasers and Laser Optics

基金項目:This work was supported by the Open Research Fund of the State Key Laboratory of Pulsed Power Laser Technology (No. SKL2017KF05), the National Natural Science Foundation of China (No. 41627803), the Key Technology Projects, and the Natural Science Foundation of Anhui Province (No. 1908085MF222).

收稿日期:2019-07-30

錄用日期:2019-11-14

網絡出版日期:2019-12-24

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Jingzhen Shao:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, ChinaState Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China
Xu Liang:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, ChinaState Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China
Libing You:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
Ning Pan:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
Ying Lin:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
Shimao Wang:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
Zanhong Deng:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
Xiaodong Fang:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
Xi Wang:Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, ChinaState Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China

聯系人作者:Xiaodong Fang([email protected]); Xi Wang([email protected]);

備注:This work was supported by the Open Research Fund of the State Key Laboratory of Pulsed Power Laser Technology (No. SKL2017KF05), the National Natural Science Foundation of China (No. 41627803), the Key Technology Projects, and the Natural Science Foundation of Anhui Province (No. 1908085MF222).

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引用該論文

Jingzhen Shao, Xu Liang, Libing You, Ning Pan, Ying Lin, Shimao Wang, Zanhong Deng, Xiaodong Fang, Xi Wang, "Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser," Chinese Optics Letters 18(2), 021403 (2020)

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